The DPS spreadsheet available
here covers everything that everyone else uses. All that remains are ki strikes, which are mostly pretty easy to calculate.
All the non-earth elemental strikes are just blah damage every 3 seconds, so you do:
blah damage per process * 1.8 processes per strike / 3 seconds per strike = blah * 0.6 DPS
And remember to account for elemental resistances/immunities (no fire strikes on Arraetrikos). If you're in Wind Stance whatever, add the double-strike chance to processes per strike. For instance: (1.8 + .1) = 1.9 processes per strike for Wind Stance 4.
Earth you should account for physical damage crits, which means you have to account for fortification and what stance you're going to be in. Outside of Earth 3+, you multiply by (17 + 2 * (2 * (1 - fort) + 1 * fort)) / 20 = (21 - 2 * fort) / 20. In Earth 3+, you use (23 - 4 * fort) / 20. Including the acid bursts is not worth your effort: the acid from Earth strike 4 is worth a whopping 0.7 DPS. (You should also include the include the increased critical multiplier in the spreadsheet, fyi.)
Touch of Death is the same except you use 15 seconds instead of 3. Touch of Death also is a little tricky in that it's not really based on processes per strike, so at monk speed you can get apparent bonus processes. My advice is to stick with 1.8 (or whatever) and expect to do very slightly higher. There's also the trouble of having a save, and most important targets don't have widely available information on their saves. Might as well guess! If you land Touch of Despair, that's worth factoring in as well.
Triple Earth finisher is trickier, because it's hard to rigorously establish a frequency for it. If you try for it all, do you get it off twice in between ToDs? Once? Once and a half? Once you have that, you do (25 - 6 * fort) / (21 - 2 * fort) multiplied by your multipliable damage (Strength, Power Attack, etc.) and processes per strike, divided by whatever you've established as a period. It won't end up being a huge factor, so don't worry too much about it.